Case Studies

Poly Seal Industries is a leading provider of molded and custom rubber goods with the ability to support projects from the design and engineering phases through final delivery to the customer.

 

Compression Molding of a 5 Zone Silicon Wafer Processing Disc for Silicon Wafer Fabrication Machinery

Compression Molding of a 5 Zone Silicon Wafer Processing Disc for Silicon Wafer Fabrication Machinery Poly Seal has a proven reputation for producing state-of-the-art products that meet the stringent quality requirements for the semiconductor industry. We produced the 5 zone silicone processing disc pictured here, for use in wafer fabrication equipment. The customer approached us with this difficult project after several other molding suppliers failed to make the part per spec. The 5 separate sealing rings and the requirement that the material be of high purity made this a difficult part to make for most molders.

Working within the customer specification, we designed a compression molding process that produced a part of very high integrity and strength which functioned exactly as designed. Translucent medical grade platinum-cured silicone was used; a high purity, dimensionally stable material that exhibits minimal shrinkage, enabling us to meet the precision +-.005 tolerance required. We used a programmable batch oven to post-cure the parts to bring the material to its maximum physical properties and purity. Along with dimensional inspection, our quality engineers conducted tensile, durometer, tear, and elongation tests to verify part integrity.

Our production, engineering, and material science expertise enabled us to turn this project in a 4 week timeframe and deliver the parts to the customer, exactly to specification. If you are interested in learning more about this project or our expert compression molding services, contact us today.

 5 Zone Silicone Wafer Processing Disc Drawing

 

5 Zone Silicon Wafer Processing Disc Project Highlights

Product Description
A vacuum disc used as part of a silicon wafer processing machine
Capabilities Applied/Processes
Primary:
Custom Compression Molding – Platinum Cured Silicone

Secondary:
Post-Curing, parylene coating
Equipment Used to Manufacture Part
300 ton Hydraulic Molding Press
Overall Part Dimensions
Diameter: 12”
Thickness: 0.75”
Estimated Part Weight: 400 grams
Tightest Tolerances
± 0.005"
Material Used
Platinum Cured Medical Grade Translucent Silicone Rubber
Material Finish
Matte
In process testing/inspection performed
Tensile Test, Durometer Test, Die B Tear, Elongation
Industry for Use
Silicon Wafer Fabrication
Delivery/Turnaround Time
4 Weeks
Delivery Location
Berkeley, CA
Standards Met
Customer Specifications, CAD Drawings
Rubber Manufacturers Association Standards
Product Name
5 Zone Silicone Rubber Disc
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